ECOSYS Gas Abatement Systems

BAZM Solutions offers Ecosys systems including Vector, Guardian and CDO.

		GUARDIAN GS4 & GS8 The Guardian GS4 & GS8 scrubbers are the industry standard for reliable, thermal oxidation and combustion of process gases. The GS4 & GS8 systems are designed to thermally oxidize spent process gases using active flame oxidation. The effluent gases pass through a wall of flame in the main chamber, ensuring ignition of flammable and pyrophoric process gases. The GS4 & GS8 technology is a proven effective solution for thermal oxidation. Guardian GS4 & GS8 Specification Guardian GS4 & GS8 Specification (PDF Format) [Photo of Guardian GS4 and GS8]

		VECTOR ULTRA Reliable treatment systems are critical to the productivity of advanced process tools. A treatment solution must have high uptime and be flexible enough to handle changing process and environmental needs. The Vector series of water scrubbers is uniquely suited to meet these challenges. [Datasheet]

		CDO DELATECH CDO The CDO™ series is an advanced point–of–use integrated thermal-wet treatment system designed to provide a controlled gas conditioning environment for today's demanding semiconductor process chemistries. The CDO 863 was specifically designed to treat fluorine generated by plasma chamber clean applications without the use of fuel or toxic reagents. Constructed with advanced metal alloys for corrosion resistance, the CDO 863 is the safest, most cost–effective abatement system for the treatment of F2 at the point–of–use ensuring customers the highest reliability and tool uptime. The patented water reagent technology incorporated in the CDO 863 combined with the latest advancements in system reliability provide the lowest cost of ownership for treating fluorine–based effluent. [Datasheet]

		NOVAPURE & NOVASAFE CANS Our high efficiency and high capacity resins were designed for semiconductor dry scrubbing. They can be used as a passive stand-alone-semiconductor dry scrubbing. They can be used as a passive stand-alone-can or installed in a NOVAPURE, TECHARMONIC or CS CLEAN SYSTEM for implant, acid and vent gas applications.

		EMERGENCY RELEASE SCRUBBER (ERS) The emergency release scrubber(ERS) is a passive soution designed to safely abate catastrophic releases of arsine gas from gas cabinets, valve manifold boxes, gas isolation boxes, fume hoods or other process equipment. Emergency Release Scrubber Application Notes
		Talk to an Expert Today Call us at: 408-887-6132

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ECOSYS Gas Abatement Systems

BAZM Solutions offers Ecosys systems including Vector, Guardian and CDO.

GUARDIAN GS4 & GS8
The Guardian GS4 & GS8 scrubbers are the industry standard for reliable, thermal oxidation and combustion of process gases. The GS4 & GS8 systems are designed to thermally oxidize spent process gases using active flame oxidation. The effluent gases pass through a wall of flame in the main chamber, ensuring ignition of flammable and pyrophoric process gases.

The GS4 & GS8 technology is a proven effective solution for thermal oxidation.

Guardian GS4 & GS8 Specification
Guardian GS4 & GS8 Specification (PDF Format)
[Photo of Guardian GS4 and GS8]

VECTOR ULTRA
Reliable treatment systems are critical to the productivity of advanced process tools. A treatment solution must have high uptime and be flexible enough to handle changing process and environmental needs. The Vector series of water scrubbers is uniquely suited to meet these challenges.

[Datasheet]

CDO
DELATECH CDO
The CDO™ series is an advanced point–of–use integrated thermal-wet treatment system designed to provide a controlled gas conditioning environment for today’s demanding semiconductor process chemistries.

The CDO 863 was specifically designed to treat fluorine generated by plasma chamber clean applications without the use of fuel or toxic reagents. Constructed with advanced metal alloys for corrosion resistance, the CDO 863 is the safest, most cost–effective abatement system for the treatment of F2 at the point–of–use ensuring customers the highest reliability and tool uptime. The patented water reagent technology incorporated in the CDO 863 combined with the latest advancements in system reliability provide the lowest cost of ownership for treating fluorine–based effluent.

[Datasheet]

NOVAPURE & NOVASAFE CANS
Our high efficiency and high capacity resins were designed for semiconductor dry scrubbing. They can be used as a passive stand-alone-semiconductor dry scrubbing. They can be used as a passive stand-alone-can or installed in a NOVAPURE, TECHARMONIC or CS CLEAN SYSTEM for implant, acid and vent gas applications.

EMERGENCY RELEASE SCRUBBER (ERS)
The emergency release scrubber(ERS) is a passive soution designed to safely abate catastrophic releases of arsine gas from gas cabinets, valve manifold boxes, gas isolation boxes, fume hoods or other process equipment.

Emergency Release Scrubber Application Notes

Talk to an Expert Today
Call us at: 408-887-6132