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Delatech CDO Gas Abatement System
The Industry Standard for Thermal-Wet Treatment
The CDO burn/wet gas abatement system was the first in the industry to combine and integrate thermal and wet treatment systems into a single system. Combining abatement technologies allowed the CDO to dominate the industry for decades given its ability to abate a broad range of gases including abatement of pyrophoric, corrosive, flammable and particulate generating process recipes.
The CDO 863 is the latest model in this product line and includes reagent addition to counter the fluorine attack from NF3 plasma cleans. This option significantly extends the Inconel liner lifetime and combined with material choices results in a system reliability provide the lowest cost of ownership for treating fluorine–based effluent.
| Applications
• Fluorine-based process chamber cleans |
|
Advantages • Designed for point–of–use fluorine abatement without fuel or toxic reagents • Will treat incompatible gases from multiple process outlets • Reduced water consumption with circulating water system • Non–clogging entry design • Lowest cost of ownership • Advanced alloys for improved corrosion resistance • Ease of installation with standard pressurized drain • Moisture suppression system reduces downstream condensation • Semi S2 and CE compliant Configurations |
| Configurations
• Number of inlets (1–4) • Fire retardant tank material– FM4910 |
Tool Communication and Interlocks
• Multiple dry contacts for customer defined requirements |
Options and Accessories
• Remote indication box • De–ionized water generator |
| CDO 863
Specifications |
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| Performance Specifications | |||
| • Process Flow 1–4 inlets | |||
| Per Inlet | 100 slm (3.5 scfm) max | ||
| Per System | 200 slm (7.1 scfm) max | ||
| • Water Consumption | |||
| Fresh Water | 0.3 gpm (1.4 Lpm) min | ||
| Chilled Water | 5 gpm (18.9 Lpm) | ||
| • Nitrogen Consumption | |||
| Consumption | 43 slm (1.5 scfm) | ||
| • CDA Consumption | |||
| w/o moisture suppression | 80 slm (2.8 scfm) | ||
| with moisture suppression | 240 slm (8.5 scfm)/span> | ||
| • Process Exhaust | |||
| Static Pressure | –5" to 0.5" w.c. (–1.2 to 0.12 kPA) | ||
| Exhaust Flow | 566 slm (20 cfm) | ||
| • Electrical Consumption | |||
| Wattage | 5,600 watts | ||
| • Reliability | |||
| MTBF | > 4,300 hours | ||
| MTTR | 4 hours | ||
| Facilities Specifications | |||
| • Process Connections | |||
| 1–4 inlets | KF–40, type 1 | ||
| • Nitrogen Gas | |||
| Source | 70–100 psi (4.8–6.9 bar) 3/8" compression fitting | ||
| • Clean Dry Air | |||
| Source | 80–100 psi (5.5–6.9 bar) 1/2" compression fitting | ||
| • Fresh Water | |||
| 45–75 psi (3.1–5.2 bar) | 1/2" female NPT | ||
| • De-ionized Water | |||
| 13–17 psi (0.9–1.2 bar) | 1/4" compression fitting | ||
| • Chilled Water | |||
| Inlet 20–60 psi (1.4–4.1 bar) | 50 °F (10 °C) | ||
| • Chilled Water | |||
| Inlet/Outlet | 1" female NPT | ||
| • Sump Pump | |||
| Drain | 1/2" female NPT | ||
| • Enclosure | |||
| Exhaust | 6" (152 mm) SS or FRP | ||
| • Process | |||
| Exhaust | ISO 4" x (100 mm) | ||
| • Electrical | |||
| Supply | 208/220 VAC, 50/60 Hz, 40 A, 3 or 4–wire | ||
| • Overall Dimensions | |||
| Dimensions | 77 H x 48 W x 41 D in (1,956 x 1,219 x 1,041 mm) | ||
| • Clearance | |||
| Front | 36 in (914 mm) | ||
| Right/Left/Rear | 12 in (305 mm) | ||
| • Weight | |||
| Shipping | 602 lbs (223 kg) | ||
| Installed | 830 lbs (375 kg) | ||
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