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Why Gas scrubbing is Needed?
What is it?
The installation of gas scrubbing devices close to the source of the gas effluent from vacuum chambers, e.g., Solar, CVD, Epi, Metal Etch, Ion Implant and MOCVD.
Why is it needed?
For any addition questions, please contact BAZM Solution - your gas abatement expert.
The installation of gas scrubbing devices close to the source of the gas effluent from vacuum chambers, e.g., Solar, CVD, Epi, Metal Etch, Ion Implant and MOCVD.
Why is it needed?
- Prevention of exhaust line clogging or corrosion.
- Eliminates transporting hazardous gases large distances.
- Regulatory requirements
- Thermal destruction (Fuel, Plasma, Electric, Catalytic)
- Water scrubbing
- Chemical adsorption (chemical reaction)
- Combination
For any addition questions, please contact BAZM Solution - your gas abatement expert.
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